| 摘要 |
<p>PURPOSE:To eliminate deterioration of film quality and decrease destruction of an electrode by constructing a film electrode part adjoining to the electron emitting part in the form of a pair of mating electrodes. CONSTITUTION:Independent No.1 electrodes 1, 2 are subjected to patterning by photo-litho etching method or liftoff method situated on a base board 6, and at the same time, an interelectrode gap 15 is provided. Then an electrode member is provided over the electrodes 1, 2 by film forming method, and No.2 electrodes 3, 4 are formed by means of photo-litho etching method or liftoff method. This may be embodied in the form of an electron emitting element by arranging an electron emitting substance 5 in the gap 15. As electron emitting part is formed by subjecting the film-formed electrode material to photo-litho etching, etc., the shape and location are controlled precisely, and thereby an element is obtained, in which deterioration of film quality is eliminated and destruction of electrode is hard to be generated, which allows accomplishment of an enlarged amount of electron emission. Also the characteristic variation element by element can be reduced.</p> |
