MOS transistor construction with self aligned silicided contacts to gate, source, and drain regions

摘要

An improved integrated circuit structure is disclosed comprising MOS devices formed with at least raised polysilicon gate contact portions. Metal silicide is formed over at least a portion of the source and drain regions to provide conductive paths to the source and drain contacts. In a preferred embodiment, the source and drain contacts also comprise raised contacts which are also formed from the same polysilicon layer to permit formation of a highly planarized structure with self-aligned contacts formed by planarizing an insulating layer formed over the structure sufficiently to expose the upper surface of all of the contacts.