| 摘要 |
A perovskite type superconductor film having a high content, almost a single phase, of high Tc phase, is formed by the steps of: depositing at least one first film of a first material (e.g., a composite oxide of Bi-Sr-Ca-Cu-O system or Tl-Ba-Ca-Cu-O system) constituting a perovskite type superconductor over a substrate; depositing at least one second film of a second material containing an oxide or element (Bi2O3 , Tl2O3 , PbOx , etc., particularly PbOx) having a vapor pressure of more than 10 <-><4>Pa at 800 DEG C at least as a main component over the substrate; to thereby form a stack of the first and second films; and heat treating the stack of the first and second films to form the perovskite type superconductor film on the substrate. |
