| 摘要 |
<p>PURPOSE:To adsorb a work by constituting a table by the adsorption member equipped with a porous body as a clamp device of the working time of the work of a semiconductor wafer, etc., and connecting to a vacuum pump. CONSTITUTION:A suction member 11 has a suction port 13 opening to the side face and upper face. A porous body 14 is fitted so that the upper face thereof is located at the plane side same as the upper face of a suction table 10 or at the slightly lower face side therefrom. As for the porous body a sintered body consisting of ceramics especially is hard, so the wear is less and preferrable from the aspects of the dust generation prevention, the flaw generation prevention of a work, etc., as well. The suction member 11 is connected by using a hose 20 and selector valve 30 or solenoid valve 31 and arranged in square or concentric circular shape according to the shape of the table. Consequently the adsorption area corresponding to the size of the work can be set by the operation of a selector valve/solenoid valve.</p> |
