| 摘要 |
PURPOSE:To make charged particle density distribution of arbitrary resolution capable visual confirmation by scanning ion beams in the X and Y direction and selecting analysis 6-area properly to substantially divide into small. CONSTITUTION:When an ion beam 11 is irradiated on an analysis plate 4, with the use of a personal computer 8 X-scan drive, X-position sensor 5, Y-scan drive and Y-position sensor 6 is driven to scan the ion beam 11 in the X and Y direction and respective X-Y information of the ion beam 11 is transmitted to the personal computer 8. The information processed in the personal computer 8 is sent in a storage scope 9 and the charged particle density distribution of the ion beam 11 is displayed to confirm visually.
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