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发明名称
PROBING APPARATUS
摘要
申请公布号
JPH02138883(A)
申请公布日期
1990.05.28
申请号
JP19880291624
申请日期
1988.11.18
申请人
TOKYO ELECTRON LTD;TERU KYUSHU KK
发明人
TATEYAMA KIYOHISA
分类号
G01R31/00;G01R1/06;G01R31/28;G02F1/1345;G09G3/36;H01L21/66
主分类号
G01R31/00
代理机构
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