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发明名称
SUBSTRATE CONVEYING DEVICE
摘要
申请公布号
JPH02138037(A)
申请公布日期
1990.05.28
申请号
JP19880291815
申请日期
1988.11.18
申请人
SOMAR CORP
发明人
SUMI SHIGEO;HAMAMURA FUMIO;SAWADA NORIYASU
分类号
G01B11/00;B65G47/91;B65H3/08;H05K3/00
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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