摘要 |
PURPOSE: To observe a sample without exposing a sample to a large amount of radioactive ray by perforating an opening on the end face of a chamber where X rays are projected and embedding a metal wheel for transmitting X rays to it, and projecting the X rays through the metal wheel to a sample that is a substance for research. CONSTITUTION: An opening 2d is perforated in a side wall 2c of a long and narrow chamber housing 2 where first edge walls 2b and 2c are provided at opposing edge parts and is embedded by an X-ray-transmission metal wheel 12 with a surface 13a at the side of the chamber 2 or a surface 13b at outside. Electron beams 9 are applied to the side of the surface 13a while being narrowed down by on objective lens 7, and beams through the wheel 12 pass through a sample 14 in a sample holder 15 provided at the side of the surface 13b and are detected by an X-ray detector 22 as transmission X rays 16. Also, X rays 17 that deviate from X rays 16 are detected by an X-ray detector 19, and the output of the detectors 22 and 19 are transferred to a multi-channel analyzer 25 via a detector selector switch 24 and is sent to an amplifier 27 for operating a CRT 28. |