发明名称 |
POSITIVE-WORKING PHOTORESISTS EMPLOYING A SELECTED MIXTURE OF ETHYL LACTATE AND ETHYL 3-ETHOXY PROPIONATE AS CASTING SOLVENT |
摘要 |
A light-sensitive composition comprising an admixture of: (a) at least one alkali-soluble binder resin; (b) at least one photoactive compound; (c) a sufficient amount of a solvent mixture comprising ethyl lactate and ethyl 3-ethoxy propionate to dissolve (a) and (b); wherein the amount of said binder resin is from about 60% to 95% by weight, the amount of said photoactive compound is from about 5% to about 40% by weight, both based on the total solids content of said light-sensitive composition, and wherein the weight ratio of ethyl lactate to ethyl 3-epoxy propionate is from about 30:70 to 80:20. |
申请公布号 |
AU4638289(A) |
申请公布日期 |
1990.05.28 |
申请号 |
AU19890046382 |
申请日期 |
1989.11.08 |
申请人 |
OLIN HUNT SPECIALTY PRODUCTS, INC. |
发明人 |
THOMAS E. SALAMY |
分类号 |
G03F7/023;G03F7/004;G03F7/022;G03F7/039;G03F7/16;H01L21/027;H01L21/30 |
主分类号 |
G03F7/023 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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