| 摘要 |
PURPOSE:To industrially and advantageously obtain beta-type high-purity silicon carbide fine powder at a low cost by carrying out SiC forming reaction of a granular composition containing silica particles present in an individually dispersed state in a carbonaceous substance as a starting material. CONSTITUTION:A starting material consisting of silica and carbon is charged into a reaction vessel equipped with a preheating, heating and cooling zones a carry out SiC forming reaction and produce silicon carbide fine powder consisting essentially of beta-type crystals. In the process, operation is performed as follows. That is a granular composition containing silica particles present in an individually dispersed state in a matrix which is a carbonaceous substance is used. In carrying out the SiC forming reaction in the afore-mentioned reaction vessel, reaction product gases produced in the reaction vessel are subjected to the SiC forming reaction without contact with a charged material into the preheating and cooling zones. |
