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发明名称
OPENING METHOD FOR SEMICONDUCTOR FUNCTIONAL COMPONENT
摘要
申请公布号
JPH02137319(A)
申请公布日期
1990.05.25
申请号
JP19880291855
申请日期
1988.11.18
申请人
FUJI ELECTRIC CO LTD
发明人
GOTOU TOMOAKI
分类号
H01L21/302;H01L21/3065;H01L29/84
主分类号
H01L21/302
代理机构
代理人
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地址
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