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发明名称
FORMATION OF METALLIC WIRING
摘要
申请公布号
JPH02137229(A)
申请公布日期
1990.05.25
申请号
JP19880291447
申请日期
1988.11.17
申请人
SANYO ELECTRIC CO LTD
发明人
TOJO JUNICHIRO
分类号
H01L21/3205;H05K3/04;H05K3/14
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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