| 摘要 |
PURPOSE:To improve lineality, reduce variation with time at a high temperature, and realize large output and strength by a method wherein crystal grain diameter is made smaller than or equal to a specified value, composition is made into perovskite structure, and polarization processing temperature is specified with respect to Curie point. CONSTITUTION:Piezoelectric ceramics in a ceramic piezoelectric element constituted of piezoelectric ceramic and an electrode is formed of perovskite structure material whose average crystal grain diameter is smaller than or equal to 1.0mum. As to polarization processing, polarization is performed in a temperature range higher than or equal to 2/5 of Curie point in centigrade and lower than or equal to Curie point. Thereby, the lineality of a ceramic piezoelectric element is improved, so that a stable ceramic piezoelectric element, wherein variation with time at a high temperature is little and output and strength are large, can be obtained. |
