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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02137373(A)
申请公布日期
1990.05.25
申请号
JP19880291591
申请日期
1988.11.18
申请人
NEC CORP
发明人
SAITO SHUICHI;OKABAYASHI HIDEKAZU;MOGAMI TORU
分类号
H01L29/78;H01L21/336;H01L29/786
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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