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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH02137215(A)
申请公布日期
1990.05.25
申请号
JP19880291295
申请日期
1988.11.17
申请人
NEC CORP
发明人
MIZUMURA HISASHI
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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