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发明名称
HORIZONTAL DIFFUSION FURNACE
摘要
申请公布号
JPH02137221(A)
申请公布日期
1990.05.25
申请号
JP19880291404
申请日期
1988.11.17
申请人
NEC KYUSHU LTD
发明人
SASAHARA KATSUYUKI
分类号
H01L21/31;H01L21/22;H01L23/427
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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