| 摘要 |
<p>PURPOSE:To cope with a large pitch alteration by providing a plurality of holding plates for holding works, a stopper for determining the arranging pitch, and a roller slidable to match the sliding operations of the plates. CONSTITUTION:Stoppers 33, 34 respectively secured to holding plates (30-32 in detail) and holding plates 30, 31 adjacent to each other for determining the intervals to the plates 31, 32, and a slide bearing 35 at the plate 32 are provided. The plates respectively secured to the stoppers 34, 35 are interlocked between all the plates by being movably engaged with adjacent plate. A wafer 4 is contained in a groove 11c to ride on a roller 17 sliding on a roller shaft 18 to slide on a slide shaft 12 to expand when a slide driving screw 14 is driven. This expansion is determined by regulating the stoppers 33, 34. Thus, the arranging pitch of the plates 11 can be altered up to the size.</p> |
