EXPOSING DEVICE FOR WAFER PERIPHERY,申请号JP19880288860-传众专利搜索

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发明名称	EXPOSING DEVICE FOR WAFER PERIPHERY
摘要
申请公布号	JPH02135724(A)	申请公布日期	1990.05.24
申请号	JP19880288860	申请日期	1988.11.17
申请人	USHIO INC	发明人	SUMIYA MASATO;OSAWA OSAMU
分类号	H01L21/30;H01L21/027	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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