| 摘要 |
PURPOSE:To increase the capacity of a capacitor by forming the lower and upper electrode layers for forming the capacitor partly in a 3-layer laminated structure in which both the upper and lower faces of a lower electrode are laminated on an upper electrode through a dielectric layer. CONSTITUTION:The lower layer 11a of an upper electrode 11 for forming a capacitor 5 is laminated between a lower electrode 9 and an insulating film 12 covering the upper face of a gate electrode 8, and further laminated between the electrode 9 and the film 12 covering the upper face of a word line 1d. The lower layer 11a of the electrode 11 is connected to the upper layer 11b of the electrode 11. Further, a dielectric layer 10 is continuously formed between the opposed faces of the electrodes 11 and 9. Thus, since the opposed area between the electrodes 11 and 9 is increased in a region formed with a 3-layer laminated structure, the charge storage amount of the capacitor can be increased. |
