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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02135730(A)
申请公布日期
1990.05.24
申请号
JP19880290989
申请日期
1988.11.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
IWASAKI MASANOBU;ITO HIROMI
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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