| 摘要 |
PURPOSE:To obtain a compact microwave laser device which can cause a uniform glow discharge with normal gas pressure with satisfactory total efficiency by operating a magnetic field at a discharger. CONSTITUTION:A microwave oscillator 11 radiates a microwave 12 to a waveguide 13, a radiated microwave 12 is transmitted to a discharger 7 through a pressure partition wall 14. A permanent magnet 10 is disposed out of the waveguide discharger 7 thereby to form a magnetic field perpendicular to a microwave electric field. Thus, a microwave discharge starting voltage is lowered to maintain a stable glow discharge. Here, an optical resonator 15 composed of a pair of mirrors is disposed out of the discharger 7, when laser gas excited by the microwave is passed through a part having the resonator 15, the laser light is amplified, oscillated to cause an effective laser oscillation. Accordingly, since the energy of the microwave is effectively injected to the discharger 7, a uniform glow discharge is formed, and a microwave laser oscillation having satisfactory total efficiency. |
