| 摘要 |
<p>Disclosed is a variable fluid flow controller for regulating the rate of flow from a source of fluid under spressure [26], comprising a plurality of unique flow restriction passageways, a valve associated with each passageway, and a rotatable cam [96] for selectively opening any one of the valves while maintaining the remaining valves closed. The flow restriction passageway preferably comprises a channel etched on the surface of a first silicon wafer [112] and enclosed by a second wafer [120] to form a fluid flow passageway [114], one of the first or second wafers having a plurality of apertures [170, 172, 174, 176, 178, 180, 182] therethrough for intersecting the passageway [114] at various distances along its length.</p> |
