发明名称 |
METHOD OF MANUFACTURING SINGLE-CRYSTAL FILM |
摘要 |
<p>The whole surface of a polycrystalline or amorphous semiconductor film deposited so as to continuously cover the surface of a single-crystal substrate and an insulating film is irradiated with a laser beam or electron beam, thereby to selectively melt only those parts of the polycrystalline or amorphous semiconductor film which overlie the insulating film. Thus, a single-crystal semiconductor film is formed only the insular insulating film formed on the single-crystal substrate.</p> |
申请公布号 |
EP0077020(B1) |
申请公布日期 |
1990.05.23 |
申请号 |
EP19820109244 |
申请日期 |
1982.10.06 |
申请人 |
HITACHI, LTD. |
发明人 |
TAMURA, MASAO;YOSHIHIRO, NAOTSUGU;NATSUAKI, NOBUYOSHI;MIYAO, MASANOBU;SUNAMI, HIDEO;TOKUYAMA, TAKASHI;OHKURA, MAKOTO |
分类号 |
H01L21/31;H01L21/20;H01L21/263;H01L21/268 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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