| 摘要 |
PURPOSE:To achieve a high speed and highly reliable characteristic measurement of a semiconductor by outputting outputs of the semiconductor or the like to a processor when changes in the outputs in response to a sweep with a power source exceeds a specified value. CONSTITUTION:Characteristics of a semiconductor 2 to be measured such as solar simulator are measured by a scanning voltage for measurement gradually increasing from a programmable power source 3. Then, the measuring voltage and an output current of the semiconductor 2 are measured through a voltage measuring device 4 and current measuring apparatus 5 respectively and memorized into a data processor 6. In this case, only when the output change of the semiconductor 2 is large, the measured voltage and current are inputted into the processor 6, not when it is small. Therefore, the measured values are memorized at a high frequency for the area large in the characteristic change. In the repeated measurements to be made several times afterwards, measured current corresponding to the measuring voltage memorized in the processor 6 is memorized to determine the average value thereof. Such an arrangement of averaging amply required measured values enables a high speed and highly reliable characteristic measurement of semiconductors. |
