| 摘要 |
PURPOSE:To prevent any pin hole in an insulating layer, and increase the manufacturing yield of a surface plate by performing a cleaning process in the midst of formation of an insulating layer in manufacturing a surface plate for color pickup tube. CONSTITUTION:In the midst of accumulating an insulating layer glass over striped transparent electrodes 3, which are formed on a glass base plate 1, by sputtering or something similar, sputtering is stopped temporarily, and the surface of an insulating layer glass 4a accumulated is washed and cleaned. At this point, dust or the like adhering before formation of an insulating layer is removed, and pin holes are formed. After that, an insulating layer glass 4b is accumulated on the layer glass 4a again by sputtering. As a result, the pin holes formed by above cleaning are filled up with the insulating layer glass 4b. |
