| 摘要 |
PURPOSE:To improve operation efficiency by adding a device for automatically contacting the position of a probe by means of a manipulator onto the electrode section of the semiconductor element or wiring with high accuracy. CONSTITUTION:The positioning mechanisms of each of a horizontal surface and a vertical surface are mounted to the porbe 2. The positioning mechanism in the horizontal surface consists of a rotary mechanism and a fore-and-aft driving mechanism. The rotary mechanism is composed of a gear 5 rotating around a shaft 7, a screwing screw 4 turning the gear 5 and a motor 3 driving the screwing screw 4, and a probe supporter 1 is rotated through the revolution of the gear 5. The fore-and-aft driving mechanism is made up of a screwing screw 9 connected to the probe supporter 1 and a motor 3' giving the screw 9 revolution, the screwing screw 9 is turned by means of the motor 3', the probe supporter 1 slides on a guide 10 and is moved fore and aft, and the probe 2 is positioned in the horizontal surface by means of the two mechanisms. The probe is positioned in the vertical surface in such a manner that a screwing screw 8 is rotated by means of a motor 3'' and the inclined plane of the pushing hardware 9 slides on the bottom surface of the probe supporter 1 and moves the bottom surface vertically. A position controller 30 previously memorizes the coordinate value of the position of the probe 2, and controls the drive of the motors 3, 3'. |
