发明名称 PATTERN INSPECTION
摘要 PURPOSE:To make it possible to provide high speed for processing-speed-pattern matching and to facilitate the change in reference pattern by seeking a point in an image to be inspected which agrees with the direction code that is obtained from the direction of the concentration gradient of the characteristic point in a reference pattern. CONSTITUTION:Direction codes (shown with arrows in the figure) in an edge image as shown in the figure (a) are stored in a frame memory 10. A judging part 11 judges whether said direction code agrees with the direction code of an initial seeking point Mp which is preset as shown in the figure (b) or not. The shape of a reference pattern [figure (b)] is expanded at the agreed point. The points where the direction codes at said points agree with the direction codes of the image to be inspected, e.g. hatched parts A - D in the figure (a), are taken out. The differentiated values at these points A - D are added along the entire reference pattern, and added value is obtained. The added value is stored together with the address on the image to be inspected corresponding to the point Mp. A place having the maximum value of each point is judged as a part which matches the reference pattern.
申请公布号 JPH02134548(A) 申请公布日期 1990.05.23
申请号 JP19880288166 申请日期 1988.11.15
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 NAKAHARA TOMOHARU;HATAZAWA SHINJI
分类号 G01B11/24;G01N21/88;G01N21/93;G01N21/956;H01L21/66;H05K3/00 主分类号 G01B11/24
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