A resonant bridge two-axis microaccelerometer is disclosed comprising polysilicon resonant bridges orthogonally attached to a silicon proof mass, such that the silicon proof mass is suspended by the resonant bridges. Acceleration in the plane of the substrate causes differential axial loads on the opposing microbridges in each pair, thereby shifting their resonant frequencies. The acceleration component aligned with a pair is measured by the difference in resonant frequencies.
申请公布号
DE3938624(A1)
申请公布日期
1990.05.23
申请号
DE19893938624
申请日期
1989.11.21
申请人
GENERAL MOTORS CORP., DETROIT, MICH., US
发明人
CHANG, SHIH-CHIA, BLOOMFIELD HILLS, MICH., US;HICKS, DAVID BYRUM, FARMINGTON HILLS, MICH., US;PUTTY, MICHAEL WILLIAM, EAST DETROIT, MICH., US