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发明名称
WAFER TRANSFER APPARATUS
摘要
申请公布号
EP0261346(A3)
申请公布日期
1990.05.23
申请号
EP19870110913
申请日期
1987.07.28
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CHRISTENSEN, RICHARD GILBERT;MACK, ALFRED
分类号
B65G47/90;B65G49/05;H01L21/67;H01L21/677;(IPC1-7):H01L21/00
主分类号
B65G47/90
代理机构
代理人
主权项
地址
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