| 摘要 |
<p>PURPOSE: To extract a signal from the region of a conductor in micrometer range by setting a probe made of an electrooptical material in a surrounding electric field from the conductor, passing a light beam through the probe, and then converting it to an electrical signal. CONSTITUTION: Electrodes 12 and 14 are arranged on a substrate 10 while they are separated by, for example, 1 micrometer. To probe a surrounding magnetic field from this kind of electrode structure, a probe system 16 is used. In the probe 16, a multiple quantum well MQW structure 18 is provided between a semiconductor substrate 20 and an upper layer 22. The substrate 20 and the upper layer 22 are optical connected to glass prisms 24 and 26. A light beam from a laser are focused by a lens 28 and become a beam 30 and is totally reflected by the substrate 20, the upper layer 22, and an end face 13 of the MQW structure 18. The output beam is 32 focused on a photodetector by a lens 34 and are converted to electrical signals. An electric field due to signals in the conductor modulates a light beam due to the intensity of the electric field and generate an output signal that is the scale of the amplitude of an optical signal. The probe 16 is not in contact with the conductor 10 due to a gap 36.</p> |
