| 摘要 |
<p>PURPOSE:To improve the operability of an apparatus by providing a machining mechanism which machines a probe again. CONSTITUTION:An output part 10 of a laser generating part 9 and an optical system 11 are provided in a vacuum chamber 1. When the tip of a probe 5 is damaged, laser light 12 is emitted from the output part 10 and condensed through the optical system 11 so as to form laser light 13. The laser light 13 is condensed at the tip part of the probe 5. Therefore, the laser light 13 is projected on the damaged probe 5, and the damaged probe 5 is machined again. Hence, it is not necessary to replace the probe, and it is not necessary to release a super-vacuum state. The time loss can be improved to a large extent.</p> |
