| 摘要 |
PURPOSE:To generate dust continuously and exactly in a prescribed rate, by rotating a disk provided with a groove, sucking dust filled in the groove, and supplying this dust to the necessary part. CONSTITUTION:A cassette 1 is provided with a spiral groove 2 and this is filled with dust. The cassette 1 is fixed to a rotary table 4 with a fixing screw 3, covered with a airtight case 7, and rotated together with the rotary table 4 at a prescribed rotating speed. The dust in the groove 2 is sucked out with an ejector mechanism 8, and supplied to the outer part, thus permitting a prescribed rate of dust to be continuously and exactly supplied. |
