| 摘要 |
PURPOSE:To realize a small-sized drawing apparatus having a simple structure and easy to adjust an optical axis by providing the first optical system consisting of a plurality of coupling lenses for independently transmitting the modulation beam from a beam modulator and optical fibers and the second optical system composed of a scanning mechanism for moving the position of an image on an object to be processed. CONSTITUTION:The beam emitted from a laser beam source 1 is split into four beams by a plurality of beam splitters 2 and a plurality of prisms 3 while four beams are incident to the incident ends 6 of optical fibers through respective modulators 4 and coupling lenses 5. Respective beams are emitted from the emitting ends 7 of the optical fibers and become parallel beams 10 by a collimator lens 9 to be bent downwardly by a prism 11 and respectively condensed to the surface of an object 13 being an object to be processed by an objective lens 12. The objective lens 12 is fixed to the leading end of a tuning fork 16 along with the prism 11 and vibrated in the direction parallel to the space shown by an arrow 17 and, as a result, the object 13 is scanned by the focus of the beams and the other end 15 of the tuning fork 16 takes movement symmetric to the leading end 14. The object 13 is present on a moving mount stand 18 and moved at an equal speed in the direction vertical to the space. |
