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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02133928(A)
申请公布日期
1990.05.23
申请号
JP19880288002
申请日期
1988.11.15
申请人
FUJITSU LTD
发明人
FUKANO SATORU
分类号
H01L29/73;H01L21/331;H01L21/76;H01L21/762;H01L29/732
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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