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发明名称
MOLECULAR BEAM EPITAXY AND ITS DEVICE
摘要
申请公布号
JPH02133392(A)
申请公布日期
1990.05.22
申请号
JP19880285682
申请日期
1988.11.14
申请人
TOSHIBA CORP
发明人
SUDO MASAAKI
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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