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发明名称	VAPOR GROWTH DEVICE
摘要
申请公布号	JPH02132820(A)	申请公布日期	1990.05.22
申请号	JP19880286140	申请日期	1988.11.11
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	MORIZAKI MOTOJI
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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