发明名称 METHOD FOR SUPPLYING MATERIAL FOR VAPOR DEPOSITION AND CONTINUOUS BODY USED THEREIN
摘要 PURPOSE:To continuously supply materials for vapor deposition to a position to be heated without requiring large force even if the materials are brittle or hard materials by connecting the plural bar-shaped or lumped materials for vapor deposition by wire-shaped or sheet-like connecting members and the transferring the continuous body to the position to be heated of a film forming device which forms films on substrates. CONSTITUTION:Both of the round bar materials 7 and the wire rods 8 are constituted of a Co-Cr alloy if the component of, for example, a molten metal 5, is the Co-Cr alloy for forming the magnetic film. In either case, the ratios of the respective components and sizes of the round bar materials 7 and the wire rods 8 are so set that the ratios of the respective components per unit length attain prescribed values. Required clearances C are made to the round bar materials 7 and the wire rods 8 are spot-welded 9 to the required points, then the round bar materials and the wire rods are connected to constitute the continuous body 10. The materials for vapor deposition are made into the above-mentioned continuous body 10 by the above- mentioned constitution even if the materials for vapor deposition are the hard materials, such as Co-Cr alloy. The continuous body 10 is thus easily un-wound from a reel 11 without using large force and is supplied to a crucible 1.
申请公布号 JPH02133567(A) 申请公布日期 1990.05.22
申请号 JP19880286154 申请日期 1988.11.11
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 INOUE ISAMU;ANDO TOMOAKI;SHINTAKU HIDENOBU
分类号 C23C14/24 主分类号 C23C14/24
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