| 摘要 |
PCT No. PCT/JP87/00880 Sec. 371 Date Jul. 25, 1988 Sec. 102(e) Date Jul. 25, 1988 PCT Filed Nov. 13, 1987 PCT Pub. No. WO88/04104 PCT Pub. Date Jun. 2, 1988.An arrangement for observing a surface using a charged particle beam irradiated on the surface of a specimen and detecting secondary electrons emitted. An exciting device produces a strong magnetic field substantially perpendicular to the surface of the specimen. Secondary electrons are extracted from a bottom or side surface of a recess, such as a through hole formed in the surface of the specimen, by an interaction between the emitted secondary electrons and the strong magnetic field. A focusing lens is arranged so as to focus the charged particles at a point on the specimen, even in the presence of a strong field. Thus, a secondary electron image on the surface of the specimen can be sharply obtained to thereby observe a secondary electron image at the bottom surface or side surface of the through hole.
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