PRODUCTION DEVICE OF SILICON SINGLE CRYSTAL,申请号JP19880284016-传众专利搜索

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发明名称	PRODUCTION DEVICE OF SILICON SINGLE CRYSTAL
摘要
申请公布号	JPH02133388(A)	申请公布日期	1990.05.22
申请号	JP19880284016	申请日期	1988.11.11
申请人	NKK CORP	发明人	SHIMA YOSHINOBU
分类号	C30B15/22;C30B29/06;H01L21/208	主分类号	C30B15/22
代理机构		代理人
主权项
地址

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