发明名称 PRODUCTION OF ULTRATHIN HEAT-RESISTANT POLYMER FILM
摘要 PURPOSE:To facilitate the formation of an Si- or Ge-containing ultrathin heat- resistant polymer film by feeding a solution of a specified soluble polymer onto the surface of a support, laminating the formed ultrathin polymer film on a substrate by adhesion and heat-treating this film. CONSTITUTION:A solution of an alternate or block copolymer of formula I (wherein R1 is H, a 1-9C alkyl, a haloalkyl or a phenyl; R2 is a 1-9C alkyl, a haloalkyl or a phenyl n>=10; or X is a group comprising a residue containing C, B, Si or Ge) or formula II or an Si- or Ge-containing soluble polymer selected from those of formulas III and IV (wherein R1-2 are each a 1-6C alkyl, a haloalkyl or a phenyl) is fed to the surface of a supporting liquid, for example, the surface of water to form an ultrathin polymer film. Such films are laminated by adhesion and heat-treated at 300-1000 deg.C.
申请公布号 JPH02133435(A) 申请公布日期 1990.05.22
申请号 JP19880287011 申请日期 1988.11.14
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 SAITO YUKIHIRO;WARATANI KATSUNORI;NICHOGI KATSUHIRO;TAOMOTO AKIRA;ASAKAWA SHIRO
分类号 G03F7/075;B32B27/00;C08J5/18;C08L83/00;C08L85/00;G03F7/16;H01L21/027;H01L21/30;H01L21/312 主分类号 G03F7/075
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