| 摘要 |
<p>PURPOSE:To manufacture substrates having orienting directions perpendicular to each other in a high yield by subjecting one substrate and the other substrate each made of a flexible sheet to diagnoal vacuum deposition at prescribed angles. CONSTITUTION:Wound substrates 1 each made of a polyethylene terephthalate film or the like for a liq. crystal display element are set in vacuum deposition apparatus A each contg. an evaporating source 4 such as SiO, and vacuum deposition is carried out at 50-70 deg. incident angle theta1 and 78-88 deg. incident angle theta2. For example, In2O3 films are formed on substrates by sputtering and patterned, one of the substrates is subjected to the diagonal vacuum deposition of SiO at 68 deg. incident angle theta1 in one apparatus A, and the other is subjected to the diagonal vacuum deposition of SiO at 85 deg. incident angle theta2 in the other apparatus A. When a twist nematic type liq. crystal display element is formed using the substrates, the liq. crystal is oriented in the direction perpendicular to the deposition direction at 50-70 deg. incident angle and it is oriented in the direction parallel to the deposition direction at 78-88 deg. incident angle. Thus, substrates having orienting directions perpendicular to each other are manufactured in a high yield.</p> |
