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发明名称
INSPECTION DEVICE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02132386(A)
申请公布日期
1990.05.21
申请号
JP19880287470
申请日期
1988.11.14
申请人
TOKYO ELECTRON LTD
发明人
TOMOYASU MASAYUKI
分类号
G01R31/26;G01R31/28;G01R31/302;G01R31/319;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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