| 摘要 |
PURPOSE:To reduce a loss, to improve leak current characteristics and to realize compactness by attaching an organic metallic salt such metal alkoxide onto an oxide film and thereafter by forming a solid-state electrolyte layer through heat processing in a vapor atmosphere. CONSTITUTION:An oxide film layer is formed on a valve action metal electrode. After an organic metallic salt such as metal alkoxide is attached onto the oxide film layer, heat treatment is conducted in vapor atmosphere to form a solid-state electrolyte layer. That is, after a solution which is made by dissolving an organic metallic salt such as metal alkoxide to xylene, etc., is applied onto a surface of a valve metal consisting of chemically treated aluminum foil and then dried, heating and decomposition are carried out in vapor atmosphere. Here, alkoxide is an organic material salt containing manganese, tin, or zinc. Reduction in loss, leak current, and device size can be realized in this way. |
