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发明名称
CHARGED PARTICLE BEAM LITHOGRAPHY EQUIPMENT
摘要
申请公布号
JPH02130815(A)
申请公布日期
1990.05.18
申请号
JP19880284771
申请日期
1988.11.10
申请人
TOSHIBA CORP
发明人
ABE TAKAYUKI
分类号
H01L21/30;H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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