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发明名称
FORMATION OF ELECTRODE WIRING OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02130818(A)
申请公布日期
1990.05.18
申请号
JP19880284626
申请日期
1988.11.10
申请人
MITSUBISHI ELECTRIC CORP
发明人
HIRAYAMA MAKOTO
分类号
H01L21/205;H01L21/285
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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