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发明名称
METHOD OF CLEANING SEMICONDUCTOR SUBSTRATE AND APPARATUS FOR CLEANING
摘要
申请公布号
JPH02130827(A)
申请公布日期
1990.05.18
申请号
JP19880284603
申请日期
1988.11.10
申请人
MITSUBISHI ELECTRIC CORP
发明人
TAMURA KATSUHIKO
分类号
B08B3/10;B08B7/00;H01L21/304
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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