| 摘要 |
PURPOSE:To reduce switching energy and to largely increase the lifetime of a switch by supplying part of total electric energy to be supplied to a glow discharge from a DC-charged capacitor, and supplying the remaining energy from a pulse-charged capacitor. CONSTITUTION:When a switch 7 is closed, the voltage of a capacitor Ca5 is applied to a preliminary ionization electrode 3b to a shunt coil 12. Since a preliminary ionization electrode 3a is of ground potential, a high voltage is applied to a gap 4, and a spark discharge is generated in the gap 4. Currents are shunted to the plurality of the gaps 4 by the operation of a shunt coil 12, and all the gaps are spark discharged. A laser gas is preliminarily ionized between main electrodes 1 and 2 with an ultraviolet ray generated by the spark discharge. Charge stored in the capacitor Ca5 is fed in a circuit of the capacitor Ca5-the switch 7-the coil 12-the electrode 3b-the gap 4-the electrode 3a-the main electrode 1-the capacitor Cp13 to charge the capacitor Cp13. |
