METHOD FOR FABRICATING SUPERCONDUCTING MATERIALS AND SUPERCONDUCTIVE THIN FILMS

摘要

Chemical reactions of superconducting raw materials (10) with active oxygen atoms and their charged particles are accelerated by using at least oxygen plasma in the fabrication process of a superconductive body (1). Thereby an ionic crystal is grown in a short time, which provides stable superconducting materials of high quality such as high critical temperature and low resistivity. In another aspect, a substrate (2) is irradiated simultaneously with streams (13) of vapor of metal elements, of which a superconductive body is to be composed, and a stream (13) of gas of ions generated in a plasma chamber (20) and film growth is effected while keeping the substrate (2) at a temperature higher than 400 DEG C to produce a ceramic type superconductive thin film.