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发明名称
SPUTTERTARGET FOR OBTAINING OPTICALLY TRANSPARENT LAYERS, AND METHOD TO PRODUCE IT
摘要
申请公布号
EP0291945(A3)
申请公布日期
1990.05.16
申请号
EP19880107928
申请日期
1988.05.18
申请人
DEMETRON GESELLSCHAFT FUR ELEKTRONIK-WERKSTOFFE M.B.H.;DEGUSSA AKTIENGESELLSCHAFT
发明人
SCHLAMP, GUNTHER DR., DIPL-.CHEM.,;GALL, KLAUS-P.,;LANGER, ADOLF;PTASCHEK, GEORG
分类号
C03C17/09;C03C17/40;C23C14/34;(IPC1-7):C23C14/34;C03C17/245;C23C14/08;G02B1/10
主分类号
C03C17/09
代理机构
代理人
主权项
地址
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