IMPROVEMENTS IN AND RELATING TO CHARGED PARTICLE BEAM SCANNING APPARATUS,申请号EP19870308185-传众专利搜索

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发明名称	IMPROVEMENTS IN AND RELATING TO CHARGED PARTICLE BEAM SCANNING APPARATUS
摘要
申请公布号	EP0261866(A3)	申请公布日期	1990.05.16
申请号	EP19870308185	申请日期	1987.09.16
申请人	NIXON, WILLIAM CHARLES, DR.;THONG, JOHN THIAM LEONG;BRETON, BERNARD CYRIL	发明人	BRETON, BERNARD CYRIL;THONG, JOHN THIAM LEONG;NIXON, WILLIAM CHARLES
分类号	H01J37/22;H01J37/28;(IPC1-7):H01J37/28;H01J37/21	主分类号	H01J37/22
代理机构		代理人
主权项
地址

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